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It remains a foundational masterpiece for understanding how silicon chips are actually made. While specific machine models mentioned might be dated, the physics and chemical principles (oxidation, diffusion, ion implantation) have not changed.

MCFT - VLSI Technology, S. M Sze | PDF | Integrated Circuit | Mosfet. enChange Language, English. 8K views696 pages. VLSI Technology by S.M. Sze | PDF - Scribd vlsi technology by sm sze pdf hot